Method of fabricating group-III nitride-based semiconductor device

US6524932

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Bibliographic Details
Main Authors:	ZHANG, XIONG, CHUA, SOO JIN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32630
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32630
record_format	dspace
spelling	sg-nus-scholar.10635-326302015-07-29T07:03:46Z Method of fabricating group-III nitride-based semiconductor device ZHANG, XIONG CHUA, SOO JIN ELECTRICAL & COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US6524932 Granted Patent 2012-05-02T02:28:02Z 2012-05-02T02:28:02Z 2003-02-25 Patent ZHANG, XIONG,CHUA, SOO JIN (2003-02-25). Method of fabricating group-III nitride-based semiconductor device. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32630 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6524932
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING ZHANG, XIONG CHUA, SOO JIN
format	Patent
author	ZHANG, XIONG CHUA, SOO JIN
spellingShingle	ZHANG, XIONG CHUA, SOO JIN Method of fabricating group-III nitride-based semiconductor device
author_sort	ZHANG, XIONG
title	Method of fabricating group-III nitride-based semiconductor device
title_short	Method of fabricating group-III nitride-based semiconductor device
title_full	Method of fabricating group-III nitride-based semiconductor device
title_fullStr	Method of fabricating group-III nitride-based semiconductor device
title_full_unstemmed	Method of fabricating group-III nitride-based semiconductor device
title_sort	method of fabricating group-iii nitride-based semiconductor device
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32630
_version_	1681081258416799744

Method of fabricating group-III nitride-based semiconductor device

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