Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity

Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity

US6534393

Saved in:
Bibliographic Details
Main Authors: ZHOU, MEI SHENG, CHHAGAN, VIJAI KUMAR, LI, JIAN XUN
Other Authors: CHEMISTRY
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32631
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-32631
record_format dspace
spelling sg-nus-scholar.10635-326312015-07-29T07:03:46Z Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity ZHOU, MEI SHENG CHHAGAN, VIJAI KUMAR LI, JIAN XUN CHEMISTRY CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) NANYANG TECHNOLOGICAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) INSTITUTE OF MICROELECTRONICS US6534393 Granted Patent 2012-05-02T02:28:03Z 2012-05-02T02:28:03Z 2003-03-18 Patent ZHOU, MEI SHENG,CHHAGAN, VIJAI KUMAR,LI, JIAN XUN (2003-03-18). Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32631 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6534393
author2 CHEMISTRY
author_facet CHEMISTRY
ZHOU, MEI SHENG
CHHAGAN, VIJAI KUMAR
LI, JIAN XUN
format Patent
author ZHOU, MEI SHENG
CHHAGAN, VIJAI KUMAR
LI, JIAN XUN
spellingShingle ZHOU, MEI SHENG
CHHAGAN, VIJAI KUMAR
LI, JIAN XUN
Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
author_sort ZHOU, MEI SHENG
title Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
title_short Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
title_full Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
title_fullStr Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
title_full_unstemmed Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
title_sort method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32631
_version_ 1681081258600300544

Similar Items