Process for device using partial SOI

Process for device using partial SOI

US6551937

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Bibliographic Details
Main Authors: JUN, CAI, HONG, REN CHANG, NAGARAJAN, RANGANATHAN, BALASUBRAMANIAN, NARAYANAN, LIANG, YUNG CHII
Other Authors: MATERIALS SCIENCE
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32637
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Institution: National University of Singapore
id sg-nus-scholar.10635-32637
record_format dspace
spelling sg-nus-scholar.10635-326372015-07-29T07:03:47Z Process for device using partial SOI JUN, CAI HONG, REN CHANG NAGARAJAN, RANGANATHAN BALASUBRAMANIAN, NARAYANAN LIANG, YUNG CHII MATERIALS SCIENCE ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF MICROELECTRONICS (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6551937 Granted Patent 2012-05-02T02:28:08Z 2012-05-02T02:28:08Z 2003-04-22 Patent JUN, CAI,HONG, REN CHANG,NAGARAJAN, RANGANATHAN,BALASUBRAMANIAN, NARAYANAN,LIANG, YUNG CHII (2003-04-22). Process for device using partial SOI. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32637 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6551937
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
JUN, CAI
HONG, REN CHANG
NAGARAJAN, RANGANATHAN
BALASUBRAMANIAN, NARAYANAN
LIANG, YUNG CHII
format Patent
author JUN, CAI
HONG, REN CHANG
NAGARAJAN, RANGANATHAN
BALASUBRAMANIAN, NARAYANAN
LIANG, YUNG CHII
spellingShingle JUN, CAI
HONG, REN CHANG
NAGARAJAN, RANGANATHAN
BALASUBRAMANIAN, NARAYANAN
LIANG, YUNG CHII
Process for device using partial SOI
author_sort JUN, CAI
title Process for device using partial SOI
title_short Process for device using partial SOI
title_full Process for device using partial SOI
title_fullStr Process for device using partial SOI
title_full_unstemmed Process for device using partial SOI
title_sort process for device using partial soi
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32637
_version_ 1681081259661459456

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