Process for device using partial SOI
US6551937
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Main Authors: | JUN, CAI, HONG, REN CHANG, NAGARAJAN, RANGANATHAN, BALASUBRAMANIAN, NARAYANAN, LIANG, YUNG CHII |
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Other Authors: | MATERIALS SCIENCE |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32637 |
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Institution: | National University of Singapore |
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