Process for device using partial SOI

Process for device using partial SOI

US6551937

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Bibliographic Details
Main Authors: JUN, CAI, HONG, REN CHANG, NAGARAJAN, RANGANATHAN, BALASUBRAMANIAN, NARAYANAN, LIANG, YUNG CHII
Other Authors: MATERIALS SCIENCE
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32637
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/32637

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