Analysis and characterization of ultra thin SOI MOSFET by MEDICI

• 主要作者: Shin, Chang Yeop.
• 其他作者: School of Materials Science & Engineering
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: http://hdl.handle.net/10356/5106
• 機構: Nanyang Technological University

In this work, the charge coupling, breakdown mechanism and self-heating effect were investigated and identified by two-dimensional and two-carrier device simulation. This work provided comprehensive understanding of unique features of ultrathin SOI MOSFETs and contributed to SOI device modeling and...