Analysis and characterization of ultra thin SOI MOSFET by MEDICI

• Main Author: Shin, Chang Yeop.
• Other Authors: School of Materials Science & Engineering
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5106
• Institution: Nanyang Technological University

In this work, the charge coupling, breakdown mechanism and self-heating effect were investigated and identified by two-dimensional and two-carrier device simulation. This work provided comprehensive understanding of unique features of ultrathin SOI MOSFETs and contributed to SOI device modeling and...