Selective deposition of a particle beam based on charging characteristics of a sample

US6608305

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Bibliographic Details
Main Authors: KIN, WONG WAI, PHANG, JACOB C. H., THONG, JOHN
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32644
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Institution: National University of Singapore