Selective deposition of a particle beam based on charging characteristics of a sample

US6608305

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Bibliographic Details
Main Authors:	KIN, WONG WAI, PHANG, JACOB C. H., THONG, JOHN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32644
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32644
record_format	dspace
spelling	sg-nus-scholar.10635-326442015-07-29T07:03:48Z Selective deposition of a particle beam based on charging characteristics of a sample KIN, WONG WAI PHANG, JACOB C. H. THONG, JOHN ELECTRICAL & COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US6608305 Granted Patent 2012-05-02T02:28:15Z 2012-05-02T02:28:15Z 2003-08-19 Patent KIN, WONG WAI,PHANG, JACOB C. H.,THONG, JOHN (2003-08-19). Selective deposition of a particle beam based on charging characteristics of a sample. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32644 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6608305
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING KIN, WONG WAI PHANG, JACOB C. H. THONG, JOHN
format	Patent
author	KIN, WONG WAI PHANG, JACOB C. H. THONG, JOHN
spellingShingle	KIN, WONG WAI PHANG, JACOB C. H. THONG, JOHN Selective deposition of a particle beam based on charging characteristics of a sample
author_sort	KIN, WONG WAI
title	Selective deposition of a particle beam based on charging characteristics of a sample
title_short	Selective deposition of a particle beam based on charging characteristics of a sample
title_full	Selective deposition of a particle beam based on charging characteristics of a sample
title_fullStr	Selective deposition of a particle beam based on charging characteristics of a sample
title_full_unstemmed	Selective deposition of a particle beam based on charging characteristics of a sample
title_sort	selective deposition of a particle beam based on charging characteristics of a sample
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32644
_version_	1681081260921847808

Selective deposition of a particle beam based on charging characteristics of a sample

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