Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating
US6660636
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2012
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32659 |
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sg-nus-scholar.10635-326592015-07-29T07:03:49Z Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating LI, SAM FONG YAU NG, HOU TEE CHEMISTRY THE NATIONAL UNIVERSITY OF SINGAPORE US6660636 Granted Patent 2012-05-02T02:28:28Z 2012-05-02T02:28:28Z 2003-12-09 Patent LI, SAM FONG YAU,NG, HOU TEE (2003-12-09). Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32659 NOT_IN_WOS PatSnap |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
US6660636 |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY LI, SAM FONG YAU NG, HOU TEE |
| format |
Patent |
| author |
LI, SAM FONG YAU NG, HOU TEE |
| spellingShingle |
LI, SAM FONG YAU NG, HOU TEE Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| author_sort |
LI, SAM FONG YAU |
| title |
Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| title_short |
Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| title_full |
Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| title_fullStr |
Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| title_full_unstemmed |
Highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| title_sort |
highly selective and complete interconnect metal line and via/contact hole filling by electroless plating |
| publishDate |
2012 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/32659 |
| _version_ |
1681081263659679744 |