Process to fabricate an integrated micro-fluidic system on a single wafer

Process to fabricate an integrated micro-fluidic system on a single wafer

US6716661

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Main Authors: ZOU, QUANBO, CHEN, YU, SINGH, JANAK, LIM, TIT MENG, YAN, TIE, HENG, CHEW KIAT
Other Authors: BIOLOGICAL SCIENCES
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32667
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Institution: National University of Singapore
id sg-nus-scholar.10635-32667
record_format dspace
spelling sg-nus-scholar.10635-326672015-07-29T07:03:50Z Process to fabricate an integrated micro-fluidic system on a single wafer ZOU, QUANBO CHEN, YU SINGH, JANAK LIM, TIT MENG YAN, TIE HENG, CHEW KIAT BIOLOGICAL SCIENCES PAEDIATRICS INSTITUTE OF MICROELECTRONICS (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6716661 Granted Patent 2012-05-02T02:28:36Z 2012-05-02T02:28:36Z 2004-04-06 Patent ZOU, QUANBO,CHEN, YU,SINGH, JANAK,LIM, TIT MENG,YAN, TIE,HENG, CHEW KIAT (2004-04-06). Process to fabricate an integrated micro-fluidic system on a single wafer. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32667 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6716661
author2 BIOLOGICAL SCIENCES
author_facet BIOLOGICAL SCIENCES
ZOU, QUANBO
CHEN, YU
SINGH, JANAK
LIM, TIT MENG
YAN, TIE
HENG, CHEW KIAT
format Patent
author ZOU, QUANBO
CHEN, YU
SINGH, JANAK
LIM, TIT MENG
YAN, TIE
HENG, CHEW KIAT
spellingShingle ZOU, QUANBO
CHEN, YU
SINGH, JANAK
LIM, TIT MENG
YAN, TIE
HENG, CHEW KIAT
Process to fabricate an integrated micro-fluidic system on a single wafer
author_sort ZOU, QUANBO
title Process to fabricate an integrated micro-fluidic system on a single wafer
title_short Process to fabricate an integrated micro-fluidic system on a single wafer
title_full Process to fabricate an integrated micro-fluidic system on a single wafer
title_fullStr Process to fabricate an integrated micro-fluidic system on a single wafer
title_full_unstemmed Process to fabricate an integrated micro-fluidic system on a single wafer
title_sort process to fabricate an integrated micro-fluidic system on a single wafer
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32667
_version_ 1681081265114054656

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