Method for fabricating semiconductor devices with reduced junction diffusion

Method for fabricating semiconductor devices with reduced junction diffusion

US8053340

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Main Authors: COLOMBEAU, BENJAMIN, YEONG, SAI HOOI, BENISTANT, FRANCIS, INDAJANG, BANGUN, CHAN, LAP
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32802
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Institution: National University of Singapore
id sg-nus-scholar.10635-32802
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spelling sg-nus-scholar.10635-328022015-07-29T07:04:04Z Method for fabricating semiconductor devices with reduced junction diffusion COLOMBEAU, BENJAMIN YEONG, SAI HOOI BENISTANT, FRANCIS INDAJANG, BANGUN CHAN, LAP CHEMICAL & BIOMOLECULAR ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) GLOBALFOUNDRIES SINGAPORE PTE. LTD. US8053340 Granted Patent 2012-05-02T02:30:38Z 2012-05-02T02:30:38Z 2011-11-08 Patent COLOMBEAU, BENJAMIN,YEONG, SAI HOOI,BENISTANT, FRANCIS,INDAJANG, BANGUN,CHAN, LAP (2011-11-08). Method for fabricating semiconductor devices with reduced junction diffusion. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32802 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US8053340
author2 CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet CHEMICAL & BIOMOLECULAR ENGINEERING
COLOMBEAU, BENJAMIN
YEONG, SAI HOOI
BENISTANT, FRANCIS
INDAJANG, BANGUN
CHAN, LAP
format Patent
author COLOMBEAU, BENJAMIN
YEONG, SAI HOOI
BENISTANT, FRANCIS
INDAJANG, BANGUN
CHAN, LAP
spellingShingle COLOMBEAU, BENJAMIN
YEONG, SAI HOOI
BENISTANT, FRANCIS
INDAJANG, BANGUN
CHAN, LAP
Method for fabricating semiconductor devices with reduced junction diffusion
author_sort COLOMBEAU, BENJAMIN
title Method for fabricating semiconductor devices with reduced junction diffusion
title_short Method for fabricating semiconductor devices with reduced junction diffusion
title_full Method for fabricating semiconductor devices with reduced junction diffusion
title_fullStr Method for fabricating semiconductor devices with reduced junction diffusion
title_full_unstemmed Method for fabricating semiconductor devices with reduced junction diffusion
title_sort method for fabricating semiconductor devices with reduced junction diffusion
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32802
_version_ 1681081289452552192

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