Method for fabricating semiconductor devices with reduced junction diffusion
US8053340
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Patent |
| Published: |
2012
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32802 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |