STUDY OF CO - HFO2 GRANULAR FILMS DEPOSITED BY SEQUENTIAL SPUTTERING

Ph.D

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Bibliographic Details
Main Author: MEGHA CHADHA
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/34455
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Institution: National University of Singapore
Language: English
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