$Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning$

Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning

Ph.D

Saved in:

Bibliographic Details
Main Author:	DU YU
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	Laser scanner; diffraction grating; Microelectromechanical Systems(MEMS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/34746
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-34746
record_format	dspace
spelling	sg-nus-scholar.10635-347462015-01-06T11:58:55Z Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning DU YU MECHANICAL ENGINEERING ZHOU GUANGYA CHAU FOOK SIONG ZHANG QINGXIN Laser scanner; diffraction grating; Microelectromechanical Systems(MEMS) Ph.D DOCTOR OF PHILOSOPHY 2012-09-30T18:00:29Z 2012-09-30T18:00:29Z 2012-02-14 Thesis DU YU (2012-02-14). Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/34746 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Laser scanner; diffraction grating; Microelectromechanical Systems(MEMS)
spellingShingle	Laser scanner; diffraction grating; Microelectromechanical Systems(MEMS) DU YU Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING DU YU
format	Theses and Dissertations
author	DU YU
author_sort	DU YU
title	Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
title_short	Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
title_full	Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
title_fullStr	Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
title_full_unstemmed	Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
title_sort	silicon-micromachined vibratory diffraction gratings for miniaturized high-resolution rapid laser scanning
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/34746
_version_	1681081530390151168

Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning

Similar Items