MICROMACHINING USING HIGH ENERGY LIGHT IONS

EP0937308A1

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Bibliographic Details
Main Authors:	WATT, FRANK, SPRINGHAM, STUART VICTOR, OSIPOWICZ, THOMAS, BREESE, MARK
Other Authors:	PHYSICS
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/34824
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-34824
record_format	dspace
spelling	sg-nus-scholar.10635-348242015-07-29T07:19:58Z MICROMACHINING USING HIGH ENERGY LIGHT IONS WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK PHYSICS NATIONAL UNIVERSITY OF SINGAPORE EP0937308A1 Published Application 2012-10-05T06:00:52Z 2012-10-05T06:00:52Z 1999-08-25 Patent WATT, FRANK,SPRINGHAM, STUART VICTOR,OSIPOWICZ, THOMAS,BREESE, MARK (1999-08-25). MICROMACHINING USING HIGH ENERGY LIGHT IONS. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/34824 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	EP0937308A1
author2	PHYSICS
author_facet	PHYSICS WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK
format	Patent
author	WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK
spellingShingle	WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK MICROMACHINING USING HIGH ENERGY LIGHT IONS
author_sort	WATT, FRANK
title	MICROMACHINING USING HIGH ENERGY LIGHT IONS
title_short	MICROMACHINING USING HIGH ENERGY LIGHT IONS
title_full	MICROMACHINING USING HIGH ENERGY LIGHT IONS
title_fullStr	MICROMACHINING USING HIGH ENERGY LIGHT IONS
title_full_unstemmed	MICROMACHINING USING HIGH ENERGY LIGHT IONS
title_sort	micromachining using high energy light ions
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/34824
_version_	1681081541397053440

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