Thermally stable fully silicided Hf silicide metal gate electrode

US20060273410A1

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Bibliographic Details
Main Authors:	PARK, CHANG SEO, CHO, BYUNG JIN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/34933
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-34933
record_format	dspace
spelling	sg-nus-scholar.10635-349332024-11-14T01:24:51Z Thermally stable fully silicided Hf silicide metal gate electrode PARK, CHANG SEO CHO, BYUNG JIN ELECTRICAL & COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US20060273410A1 Published Application 2012-10-08T08:22:56Z 2012-10-08T08:22:56Z 2006-12-07 Patent PARK, CHANG SEO,CHO, BYUNG JIN (2006-12-07). Thermally stable fully silicided Hf silicide metal gate electrode. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/34933 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	US20060273410A1
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING PARK, CHANG SEO CHO, BYUNG JIN
format	Patent
author	PARK, CHANG SEO CHO, BYUNG JIN
spellingShingle	PARK, CHANG SEO CHO, BYUNG JIN Thermally stable fully silicided Hf silicide metal gate electrode
author_sort	PARK, CHANG SEO
title	Thermally stable fully silicided Hf silicide metal gate electrode
title_short	Thermally stable fully silicided Hf silicide metal gate electrode
title_full	Thermally stable fully silicided Hf silicide metal gate electrode
title_fullStr	Thermally stable fully silicided Hf silicide metal gate electrode
title_full_unstemmed	Thermally stable fully silicided Hf silicide metal gate electrode
title_sort	thermally stable fully silicided hf silicide metal gate electrode
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/34933
_version_	1821190835221299200

Thermally stable fully silicided Hf silicide metal gate electrode

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