Schottky Barrier Engineering for Contacts in Advanced CMOS Technology

Ph.D

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Bibliographic Details
Main Author:	PHYLLIS LIM SHI YA
Other Authors:	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	Schottky barrier, Nickel silicide, Nickel digermanide, FinFETs, Laser anneal, Contacts.
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/35897
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-35897
record_format	dspace
spelling	sg-nus-scholar.10635-358972015-01-08T23:27:11Z Schottky Barrier Engineering for Contacts in Advanced CMOS Technology PHYLLIS LIM SHI YA NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG YEO YEE CHIA LO GUO QIANG PATRICK CHI DONGZHI Schottky barrier, Nickel silicide, Nickel digermanide, FinFETs, Laser anneal, Contacts. Ph.D DOCTOR OF PHILOSOPHY 2012-12-31T18:04:46Z 2012-12-31T18:04:46Z 2012-07-06 Thesis PHYLLIS LIM SHI YA (2012-07-06). Schottky Barrier Engineering for Contacts in Advanced CMOS Technology. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/35897 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Schottky barrier, Nickel silicide, Nickel digermanide, FinFETs, Laser anneal, Contacts.
spellingShingle	Schottky barrier, Nickel silicide, Nickel digermanide, FinFETs, Laser anneal, Contacts. PHYLLIS LIM SHI YA Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
description	Ph.D
author2	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
author_facet	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG PHYLLIS LIM SHI YA
format	Theses and Dissertations
author	PHYLLIS LIM SHI YA
author_sort	PHYLLIS LIM SHI YA
title	Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
title_short	Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
title_full	Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
title_fullStr	Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
title_full_unstemmed	Schottky Barrier Engineering for Contacts in Advanced CMOS Technology
title_sort	schottky barrier engineering for contacts in advanced cmos technology
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/35897
_version_	1681081640564031488

Schottky Barrier Engineering for Contacts in Advanced CMOS Technology

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