An Investigation on High-resolution Nanopatterning Techniques

Ph.D

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Bibliographic Details
Main Author:	AMIR TAVAKKOLI KERMANI GHARIEHALI
Other Authors:	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	Nanofabrication, Directed Block Copolymer Self-Assembly, Electron Beam Lithography, Reverse Nanoimprint Lithography, Sacrificial Post-Templating
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/36325
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-36325
record_format	dspace
spelling	sg-nus-scholar.10635-363252015-01-10T12:07:09Z An Investigation on High-resolution Nanopatterning Techniques AMIR TAVAKKOLI KERMANI GHARIEHALI NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG CHONG TOW CHONG S N PIRAMANAYAGAM Nanofabrication, Directed Block Copolymer Self-Assembly, Electron Beam Lithography, Reverse Nanoimprint Lithography, Sacrificial Post-Templating Ph.D DOCTOR OF PHILOSOPHY 2013-02-28T18:00:27Z 2013-02-28T18:00:27Z 2012-09-21 Thesis AMIR TAVAKKOLI KERMANI GHARIEHALI (2012-09-21). An Investigation on High-resolution Nanopatterning Techniques. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/36325 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Nanofabrication, Directed Block Copolymer Self-Assembly, Electron Beam Lithography, Reverse Nanoimprint Lithography, Sacrificial Post-Templating
spellingShingle	Nanofabrication, Directed Block Copolymer Self-Assembly, Electron Beam Lithography, Reverse Nanoimprint Lithography, Sacrificial Post-Templating AMIR TAVAKKOLI KERMANI GHARIEHALI An Investigation on High-resolution Nanopatterning Techniques
description	Ph.D
author2	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
author_facet	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG AMIR TAVAKKOLI KERMANI GHARIEHALI
format	Theses and Dissertations
author	AMIR TAVAKKOLI KERMANI GHARIEHALI
author_sort	AMIR TAVAKKOLI KERMANI GHARIEHALI
title	An Investigation on High-resolution Nanopatterning Techniques
title_short	An Investigation on High-resolution Nanopatterning Techniques
title_full	An Investigation on High-resolution Nanopatterning Techniques
title_fullStr	An Investigation on High-resolution Nanopatterning Techniques
title_full_unstemmed	An Investigation on High-resolution Nanopatterning Techniques
title_sort	investigation on high-resolution nanopatterning techniques
publishDate	2013
url	http://scholarbank.nus.edu.sg/handle/10635/36325
_version_	1681081660609658880

An Investigation on High-resolution Nanopatterning Techniques

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