An Investigation on High-resolution Nanopatterning Techniques

Ph.D

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Bibliographic Details
Main Author:	AMIR TAVAKKOLI KERMANI GHARIEHALI
Other Authors:	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	Nanofabrication, Directed Block Copolymer Self-Assembly, Electron Beam Lithography, Reverse Nanoimprint Lithography, Sacrificial Post-Templating
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/36325
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Institution:	National University of Singapore
Language:	English

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