Laser-ablation for MEMS microfabrication on Si and Kapton substrates

Laser-ablation for MEMS microfabrication on Si and Kapton substrates

10.1117/12.486521

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Bibliographic Details
Main Authors: Lan, B., Hong, M.H., Ye, K.D., Chen, S.X., Chong, T.C.
Other Authors: COMPUTER SCIENCE
Format: Conference or Workshop Item
Published: 2013
Subjects:
Diffraction rings
Drilling
Kapton
Laser ablation
Nozzle
Via hole
Online Access:http://scholarbank.nus.edu.sg/handle/10635/40856
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Institution: National University of Singapore
Description
Summary:10.1117/12.486521

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