Laser-ablation for MEMS microfabrication on Si and Kapton substrates

10.1117/12.486521

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Bibliographic Details
Main Authors:	Lan, B., Hong, M.H., Ye, K.D., Chen, S.X., Chong, T.C.
Other Authors:	COMPUTER SCIENCE
Format:	Conference or Workshop Item
Published:	2013
Subjects:	Diffraction rings Drilling Kapton Laser ablation Nozzle Via hole
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/40856
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Institution:	National University of Singapore

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