Laser-ablation for MEMS microfabrication on Si and Kapton substrates

Laser-ablation for MEMS microfabrication on Si and Kapton substrates

10.1117/12.486521

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Bibliographic Details
Main Authors: Lan, B., Hong, M.H., Ye, K.D., Chen, S.X., Chong, T.C.
Other Authors: COMPUTER SCIENCE
Format: Conference or Workshop Item
Published: 2013
Subjects:
Diffraction rings
Drilling
Kapton
Laser ablation
Nozzle
Via hole
Online Access:http://scholarbank.nus.edu.sg/handle/10635/40856
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Institution: National University of Singapore
id sg-nus-scholar.10635-40856
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spelling sg-nus-scholar.10635-408562023-10-25T21:42:00Z Laser-ablation for MEMS microfabrication on Si and Kapton substrates Lan, B. Hong, M.H. Ye, K.D. Chen, S.X. Chong, T.C. COMPUTER SCIENCE Diffraction rings Drilling Kapton Laser ablation Nozzle Via hole 10.1117/12.486521 Proceedings of SPIE - The International Society for Optical Engineering 4830 196-200 PSISD 2013-07-04T08:13:56Z 2013-07-04T08:13:56Z 2002 Conference Paper Lan, B., Hong, M.H., Ye, K.D., Chen, S.X., Chong, T.C. (2002). Laser-ablation for MEMS microfabrication on Si and Kapton substrates. Proceedings of SPIE - The International Society for Optical Engineering 4830 : 196-200. ScholarBank@NUS Repository. https://doi.org/10.1117/12.486521 0277786X http://scholarbank.nus.edu.sg/handle/10635/40856 000181979300035 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diffraction rings
Drilling
Kapton
Laser ablation
Nozzle
Via hole
spellingShingle Diffraction rings
Drilling
Kapton
Laser ablation
Nozzle
Via hole
Lan, B.
Hong, M.H.
Ye, K.D.
Chen, S.X.
Chong, T.C.
Laser-ablation for MEMS microfabrication on Si and Kapton substrates
description 10.1117/12.486521
author2 COMPUTER SCIENCE
author_facet COMPUTER SCIENCE
Lan, B.
Hong, M.H.
Ye, K.D.
Chen, S.X.
Chong, T.C.
format Conference or Workshop Item
author Lan, B.
Hong, M.H.
Ye, K.D.
Chen, S.X.
Chong, T.C.
author_sort Lan, B.
title Laser-ablation for MEMS microfabrication on Si and Kapton substrates
title_short Laser-ablation for MEMS microfabrication on Si and Kapton substrates
title_full Laser-ablation for MEMS microfabrication on Si and Kapton substrates
title_fullStr Laser-ablation for MEMS microfabrication on Si and Kapton substrates
title_full_unstemmed Laser-ablation for MEMS microfabrication on Si and Kapton substrates
title_sort laser-ablation for mems microfabrication on si and kapton substrates
publishDate 2013
url http://scholarbank.nus.edu.sg/handle/10635/40856
_version_ 1781411101676666880

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