MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY

Ph.D

Saved in:

Bibliographic Details
Main Author:	TANG XIAOSONG
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	sled, ultra-low friction, microfabrication, superlubricity, MEMS cantilever, 3-point contact
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/43581
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-43581
record_format	dspace
spelling	sg-nus-scholar.10635-435812015-09-23T20:07:34Z MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY TANG XIAOSONG MECHANICAL ENGINEERING ZHOU GUANGYA SEAN O'SHEA sled, ultra-low friction, microfabrication, superlubricity, MEMS cantilever, 3-point contact Ph.D DOCTOR OF PHILOSOPHY 2013-08-31T18:01:01Z 2013-08-31T18:01:01Z 2013-01-22 Thesis TANG XIAOSONG (2013-01-22). MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/43581 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	sled, ultra-low friction, microfabrication, superlubricity, MEMS cantilever, 3-point contact
spellingShingle	sled, ultra-low friction, microfabrication, superlubricity, MEMS cantilever, 3-point contact TANG XIAOSONG MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING TANG XIAOSONG
format	Theses and Dissertations
author	TANG XIAOSONG
author_sort	TANG XIAOSONG
title	MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
title_short	MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
title_full	MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
title_fullStr	MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
title_full_unstemmed	MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY
title_sort	microfabrication of mems and afm platforms for lubrication study
publishDate	2013
url	http://scholarbank.nus.edu.sg/handle/10635/43581
_version_	1681082788258775040

MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY

Similar Items