Novel Actuation Mechanisms for MEMS Mirrors

Ph.D

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Bibliographic Details
Main Author:	KOH KAH HOW
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	MEMS, Micromirrors, Microscanner, Variable Optical Attenuator, Actuation Mechanism
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/43727
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-43727
record_format	dspace
spelling	sg-nus-scholar.10635-437272015-01-07T10:34:54Z Novel Actuation Mechanisms for MEMS Mirrors KOH KAH HOW ELECTRICAL & COMPUTER ENGINEERING LEE CHENGKUO MEMS, Micromirrors, Microscanner, Variable Optical Attenuator, Actuation Mechanism Ph.D DOCTOR OF PHILOSOPHY 2013-09-30T18:00:20Z 2013-09-30T18:00:20Z 2013-01-11 Thesis KOH KAH HOW (2013-01-11). Novel Actuation Mechanisms for MEMS Mirrors. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/43727 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	MEMS, Micromirrors, Microscanner, Variable Optical Attenuator, Actuation Mechanism
spellingShingle	MEMS, Micromirrors, Microscanner, Variable Optical Attenuator, Actuation Mechanism KOH KAH HOW Novel Actuation Mechanisms for MEMS Mirrors
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING KOH KAH HOW
format	Theses and Dissertations
author	KOH KAH HOW
author_sort	KOH KAH HOW
title	Novel Actuation Mechanisms for MEMS Mirrors
title_short	Novel Actuation Mechanisms for MEMS Mirrors
title_full	Novel Actuation Mechanisms for MEMS Mirrors
title_fullStr	Novel Actuation Mechanisms for MEMS Mirrors
title_full_unstemmed	Novel Actuation Mechanisms for MEMS Mirrors
title_sort	novel actuation mechanisms for mems mirrors
publishDate	2013
url	http://scholarbank.nus.edu.sg/handle/10635/43727
_version_	1681082797400260608

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