NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING

Ph.D

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Bibliographic Details
Main Author:	SONG JIAO
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2014
Subjects:	3D nanoscale silicon machining, ion irradiation, electrochemical etching, Silicon Nanostencils, Enhanced Photoluminescence, Nanowires formation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/49109
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-49109
record_format	dspace
spelling	sg-nus-scholar.10635-491092015-09-23T20:14:18Z NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING SONG JIAO PHYSICS MARK B H BREESE WATT, FRANK 3D nanoscale silicon machining, ion irradiation, electrochemical etching, Silicon Nanostencils, Enhanced Photoluminescence, Nanowires formation Ph.D DOCTOR OF PHILOSOPHY 2014-01-31T18:00:20Z 2014-01-31T18:00:20Z 2013-08-14 Thesis SONG JIAO (2013-08-14). NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/49109 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	3D nanoscale silicon machining, ion irradiation, electrochemical etching, Silicon Nanostencils, Enhanced Photoluminescence, Nanowires formation
spellingShingle	3D nanoscale silicon machining, ion irradiation, electrochemical etching, Silicon Nanostencils, Enhanced Photoluminescence, Nanowires formation SONG JIAO NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS SONG JIAO
format	Theses and Dissertations
author	SONG JIAO
author_sort	SONG JIAO
title	NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
title_short	NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
title_full	NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
title_fullStr	NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
title_full_unstemmed	NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
title_sort	nano-scale machining of silicon using ion irradiation and electrochemical etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/49109
_version_	1681083548590669824

NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING

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