NANO-SCALE MACHINING OF SILICON USING ION IRRADIATION AND ELECTROCHEMICAL ETCHING
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/49109 |
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| Institution: | National University of Singapore |
| Language: | English |