Surface micromachined pressure sensing structures with biocompatible interface

Surface micromachined pressure sensing structures with biocompatible interface

Sensors and Materials

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Bibliographic Details
Main Authors: Liao, E., Ang, S., Ong, A.T.A., Liang, Y.C., Jin, A.Y.U.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Biocompatible interface
Pressure sensor
Surface micromachining
Temporomandibular disorder
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51054
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Institution: National University of Singapore
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Summary:Sensors and Materials

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