Surface micromachined pressure sensing structures with biocompatible interface

• Main Authors: Liao, E., Ang, S., Ong, A.T.A., Liang, Y.C., Jin, A.Y.U.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Biocompatible interface; Pressure sensor; Surface micromachining; Temporomandibular disorder
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/51054
• Institution: National University of Singapore

Sensors and Materials