Surface micromachined pressure sensing structures with biocompatible interface

Sensors and Materials

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Main Authors:	Liao, E., Ang, S., Ong, A.T.A., Liang, Y.C., Jin, A.Y.U.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51054
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51054
record_format	dspace
spelling	sg-nus-scholar.10635-510542015-01-07T11:13:01Z Surface micromachined pressure sensing structures with biocompatible interface Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING RESTORATIVE DENTISTRY Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder Sensors and Materials 16 3 159-169 2014-04-24T07:25:10Z 2014-04-24T07:25:10Z 2004 Article Liao, E.,Ang, S.,Ong, A.T.A.,Liang, Y.C.,Jin, A.Y.U. (2004). Surface micromachined pressure sensing structures with biocompatible interface. Sensors and Materials 16 (3) : 159-169. ScholarBank@NUS Repository. 09144935 http://scholarbank.nus.edu.sg/handle/10635/51054 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder
spellingShingle	Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. Surface micromachined pressure sensing structures with biocompatible interface
description	Sensors and Materials
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U.
format	Article
author	Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U.
author_sort	Liao, E.
title	Surface micromachined pressure sensing structures with biocompatible interface
title_short	Surface micromachined pressure sensing structures with biocompatible interface
title_full	Surface micromachined pressure sensing structures with biocompatible interface
title_fullStr	Surface micromachined pressure sensing structures with biocompatible interface
title_full_unstemmed	Surface micromachined pressure sensing structures with biocompatible interface
title_sort	surface micromachined pressure sensing structures with biocompatible interface
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51054
_version_	1681083777658388480

Surface micromachined pressure sensing structures with biocompatible interface

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