Surface micromachined pressure sensing structures with biocompatible interface
Sensors and Materials
Saved in:
Main Authors: | , , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/51054 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-51054 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-510542015-01-07T11:13:01Z Surface micromachined pressure sensing structures with biocompatible interface Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING RESTORATIVE DENTISTRY Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder Sensors and Materials 16 3 159-169 2014-04-24T07:25:10Z 2014-04-24T07:25:10Z 2004 Article Liao, E.,Ang, S.,Ong, A.T.A.,Liang, Y.C.,Jin, A.Y.U. (2004). Surface micromachined pressure sensing structures with biocompatible interface. Sensors and Materials 16 (3) : 159-169. ScholarBank@NUS Repository. 09144935 http://scholarbank.nus.edu.sg/handle/10635/51054 NOT_IN_WOS Scopus |
institution |
National University of Singapore |
building |
NUS Library |
country |
Singapore |
collection |
ScholarBank@NUS |
topic |
Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder |
spellingShingle |
Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. Surface micromachined pressure sensing structures with biocompatible interface |
description |
Sensors and Materials |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. |
format |
Article |
author |
Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. |
author_sort |
Liao, E. |
title |
Surface micromachined pressure sensing structures with biocompatible interface |
title_short |
Surface micromachined pressure sensing structures with biocompatible interface |
title_full |
Surface micromachined pressure sensing structures with biocompatible interface |
title_fullStr |
Surface micromachined pressure sensing structures with biocompatible interface |
title_full_unstemmed |
Surface micromachined pressure sensing structures with biocompatible interface |
title_sort |
surface micromachined pressure sensing structures with biocompatible interface |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/51054 |
_version_ |
1681083777658388480 |