Surface micromachined pressure sensing structures with biocompatible interface

Sensors and Materials

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Main Authors: Liao, E., Ang, S., Ong, A.T.A., Liang, Y.C., Jin, A.Y.U.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/51054
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-510542015-01-07T11:13:01Z Surface micromachined pressure sensing structures with biocompatible interface Liao, E. Ang, S. Ong, A.T.A. Liang, Y.C. Jin, A.Y.U. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING RESTORATIVE DENTISTRY Biocompatible interface Pressure sensor Surface micromachining Temporomandibular disorder Sensors and Materials 16 3 159-169 2014-04-24T07:25:10Z 2014-04-24T07:25:10Z 2004 Article Liao, E.,Ang, S.,Ong, A.T.A.,Liang, Y.C.,Jin, A.Y.U. (2004). Surface micromachined pressure sensing structures with biocompatible interface. Sensors and Materials 16 (3) : 159-169. ScholarBank@NUS Repository. 09144935 http://scholarbank.nus.edu.sg/handle/10635/51054 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Biocompatible interface
Pressure sensor
Surface micromachining
Temporomandibular disorder
spellingShingle Biocompatible interface
Pressure sensor
Surface micromachining
Temporomandibular disorder
Liao, E.
Ang, S.
Ong, A.T.A.
Liang, Y.C.
Jin, A.Y.U.
Surface micromachined pressure sensing structures with biocompatible interface
description Sensors and Materials
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Liao, E.
Ang, S.
Ong, A.T.A.
Liang, Y.C.
Jin, A.Y.U.
format Article
author Liao, E.
Ang, S.
Ong, A.T.A.
Liang, Y.C.
Jin, A.Y.U.
author_sort Liao, E.
title Surface micromachined pressure sensing structures with biocompatible interface
title_short Surface micromachined pressure sensing structures with biocompatible interface
title_full Surface micromachined pressure sensing structures with biocompatible interface
title_fullStr Surface micromachined pressure sensing structures with biocompatible interface
title_full_unstemmed Surface micromachined pressure sensing structures with biocompatible interface
title_sort surface micromachined pressure sensing structures with biocompatible interface
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/51054
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