Library-based performance-based OPC
10.1117/12.846469
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2014
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sg-nus-scholar.10635-512012023-10-25T07:39:52Z Library-based performance-based OPC Teh, S.-H. Heng, C.-H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Design-process integration Device performance Mask design Non-rectangular transistor OPC 10.1117/12.846469 Proceedings of SPIE - The International Society for Optical Engineering 7641 - PSISD 2014-04-24T08:36:14Z 2014-04-24T08:36:14Z 2010 Conference Paper Teh, S.-H., Heng, C.-H., Tay, A. (2010). Library-based performance-based OPC. Proceedings of SPIE - The International Society for Optical Engineering 7641 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.846469 9780819480552 0277786X http://scholarbank.nus.edu.sg/handle/10635/51201 000285571800028 Scopus |
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Design-process integration Device performance Mask design Non-rectangular transistor OPC |
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Design-process integration Device performance Mask design Non-rectangular transistor OPC Teh, S.-H. Heng, C.-H. Tay, A. Library-based performance-based OPC |
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10.1117/12.846469 |
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ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Teh, S.-H. Heng, C.-H. Tay, A. |
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Conference or Workshop Item |
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Teh, S.-H. Heng, C.-H. Tay, A. |
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Teh, S.-H. |
title |
Library-based performance-based OPC |
title_short |
Library-based performance-based OPC |
title_full |
Library-based performance-based OPC |
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Library-based performance-based OPC |
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Library-based performance-based OPC |
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library-based performance-based opc |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/51201 |
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1781411662701527040 |