Library-based performance-based OPC

10.1117/12.846469

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Bibliographic Details
Main Authors:	Teh, S.-H., Heng, C.-H., Tay, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Design-process integration Device performance Mask design Non-rectangular transistor OPC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51201
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51201
record_format	dspace
spelling	sg-nus-scholar.10635-512012023-10-25T07:39:52Z Library-based performance-based OPC Teh, S.-H. Heng, C.-H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Design-process integration Device performance Mask design Non-rectangular transistor OPC 10.1117/12.846469 Proceedings of SPIE - The International Society for Optical Engineering 7641 - PSISD 2014-04-24T08:36:14Z 2014-04-24T08:36:14Z 2010 Conference Paper Teh, S.-H., Heng, C.-H., Tay, A. (2010). Library-based performance-based OPC. Proceedings of SPIE - The International Society for Optical Engineering 7641 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.846469 9780819480552 0277786X http://scholarbank.nus.edu.sg/handle/10635/51201 000285571800028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Design-process integration Device performance Mask design Non-rectangular transistor OPC
spellingShingle	Design-process integration Device performance Mask design Non-rectangular transistor OPC Teh, S.-H. Heng, C.-H. Tay, A. Library-based performance-based OPC
description	10.1117/12.846469
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Teh, S.-H. Heng, C.-H. Tay, A.
format	Conference or Workshop Item
author	Teh, S.-H. Heng, C.-H. Tay, A.
author_sort	Teh, S.-H.
title	Library-based performance-based OPC
title_short	Library-based performance-based OPC
title_full	Library-based performance-based OPC
title_fullStr	Library-based performance-based OPC
title_full_unstemmed	Library-based performance-based OPC
title_sort	library-based performance-based opc
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51201
_version_	1781411662701527040

Library-based performance-based OPC

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