Theoretical model of a three plates capacitive pressure sensor

Conference Record - IEEE Instrumentation and Measurement Technology Conference

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Bibliographic Details
Main Authors: Ge, P., Tan, W.W., Tay, F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FEM
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51263
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-512632024-11-12T19:00:22Z Theoretical model of a three plates capacitive pressure sensor Ge, P. Tan, W.W. Tay, F. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Diaphragm deformation FEM Pressure sensor Simulation Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 214-219 CRIIE 2014-04-24T08:38:03Z 2014-04-24T08:38:03Z 2005 Conference Paper Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository. 0780388798 10915281 http://scholarbank.nus.edu.sg/handle/10635/51263 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diaphragm deformation
FEM
Pressure sensor
Simulation
spellingShingle Diaphragm deformation
FEM
Pressure sensor
Simulation
Ge, P.
Tan, W.W.
Tay, F.
Theoretical model of a three plates capacitive pressure sensor
description Conference Record - IEEE Instrumentation and Measurement Technology Conference
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ge, P.
Tan, W.W.
Tay, F.
format Conference or Workshop Item
author Ge, P.
Tan, W.W.
Tay, F.
author_sort Ge, P.
title Theoretical model of a three plates capacitive pressure sensor
title_short Theoretical model of a three plates capacitive pressure sensor
title_full Theoretical model of a three plates capacitive pressure sensor
title_fullStr Theoretical model of a three plates capacitive pressure sensor
title_full_unstemmed Theoretical model of a three plates capacitive pressure sensor
title_sort theoretical model of a three plates capacitive pressure sensor
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/51263
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