Theoretical model of a three plates capacitive pressure sensor

Conference Record - IEEE Instrumentation and Measurement Technology Conference

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Bibliographic Details
Main Authors:	Ge, P., Tan, W.W., Tay, F.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diaphragm deformation FEM Pressure sensor Simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51263
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51263
record_format	dspace
spelling	sg-nus-scholar.10635-512632015-01-09T04:50:00Z Theoretical model of a three plates capacitive pressure sensor Ge, P. Tan, W.W. Tay, F. MECHANICAL ENGINEERING ELECTRICAL & COMPUTER ENGINEERING Diaphragm deformation FEM Pressure sensor Simulation Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 214-219 CRIIE 2014-04-24T08:38:03Z 2014-04-24T08:38:03Z 2005 Conference Paper Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository. 0780388798 10915281 http://scholarbank.nus.edu.sg/handle/10635/51263 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Diaphragm deformation FEM Pressure sensor Simulation
spellingShingle	Diaphragm deformation FEM Pressure sensor Simulation Ge, P. Tan, W.W. Tay, F. Theoretical model of a three plates capacitive pressure sensor
description	Conference Record - IEEE Instrumentation and Measurement Technology Conference
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Ge, P. Tan, W.W. Tay, F.
format	Conference or Workshop Item
author	Ge, P. Tan, W.W. Tay, F.
author_sort	Ge, P.
title	Theoretical model of a three plates capacitive pressure sensor
title_short	Theoretical model of a three plates capacitive pressure sensor
title_full	Theoretical model of a three plates capacitive pressure sensor
title_fullStr	Theoretical model of a three plates capacitive pressure sensor
title_full_unstemmed	Theoretical model of a three plates capacitive pressure sensor
title_sort	theoretical model of a three plates capacitive pressure sensor
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51263
_version_	1681083815168049152

Theoretical model of a three plates capacitive pressure sensor

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