Ab initio simulations of low-k and ultra low-k dielectric interconnects

Diffusion and Defect Data Pt.B: Solid State Phenomena

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Bibliographic Details
Main Authors:	Tan, V.B.C., Dai, L., Yang, S.W., Chen, X.T., Wu, P.
Other Authors:	NUS NANOSCIENCE & NANOTECH INITIATIVE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Ab initio molecular dynamics Diffusion barrier Low-k dielectrics
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51556
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51556
record_format	dspace
spelling	sg-nus-scholar.10635-515562015-01-08T17:48:22Z Ab initio simulations of low-k and ultra low-k dielectric interconnects Tan, V.B.C. Dai, L. Yang, S.W. Chen, X.T. Wu, P. NUS NANOSCIENCE & NANOTECH INITIATIVE MECHANICAL ENGINEERING Ab initio molecular dynamics Diffusion barrier Low-k dielectrics Diffusion and Defect Data Pt.B: Solid State Phenomena 121-123 PART 2 1061-1064 DDBPE 2014-04-24T10:15:03Z 2014-04-24T10:15:03Z 2007 Conference Paper Tan, V.B.C.,Dai, L.,Yang, S.W.,Chen, X.T.,Wu, P. (2007). Ab initio simulations of low-k and ultra low-k dielectric interconnects. Diffusion and Defect Data Pt.B: Solid State Phenomena 121-123 (PART 2) : 1061-1064. ScholarBank@NUS Repository. 3908451302 10120394 http://scholarbank.nus.edu.sg/handle/10635/51556 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Ab initio molecular dynamics Diffusion barrier Low-k dielectrics
spellingShingle	Ab initio molecular dynamics Diffusion barrier Low-k dielectrics Tan, V.B.C. Dai, L. Yang, S.W. Chen, X.T. Wu, P. Ab initio simulations of low-k and ultra low-k dielectric interconnects
description	Diffusion and Defect Data Pt.B: Solid State Phenomena
author2	NUS NANOSCIENCE & NANOTECH INITIATIVE
author_facet	NUS NANOSCIENCE & NANOTECH INITIATIVE Tan, V.B.C. Dai, L. Yang, S.W. Chen, X.T. Wu, P.
format	Conference or Workshop Item
author	Tan, V.B.C. Dai, L. Yang, S.W. Chen, X.T. Wu, P.
author_sort	Tan, V.B.C.
title	Ab initio simulations of low-k and ultra low-k dielectric interconnects
title_short	Ab initio simulations of low-k and ultra low-k dielectric interconnects
title_full	Ab initio simulations of low-k and ultra low-k dielectric interconnects
title_fullStr	Ab initio simulations of low-k and ultra low-k dielectric interconnects
title_full_unstemmed	Ab initio simulations of low-k and ultra low-k dielectric interconnects
title_sort	ab initio simulations of low-k and ultra low-k dielectric interconnects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51556
_version_	1681083867747844096

Ab initio simulations of low-k and ultra low-k dielectric interconnects

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