Microtribometer based on a rotational grating displacement sensing mechanism

Microtribometer based on a rotational grating displacement sensing mechanism

10.1109/OMEMS.2011.6031010

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Bibliographic Details
Main Authors: Yu, H., Zhou, G., Chau, F.S., Sinha, S.K., Leong, Y.J.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
adhesion
coefficient of friction
grating
MEMS
microtribometer
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51624
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Institution: National University of Singapore
id sg-nus-scholar.10635-51624
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spelling sg-nus-scholar.10635-516242015-01-15T04:43:32Z Microtribometer based on a rotational grating displacement sensing mechanism Yu, H. Zhou, G. Chau, F.S. Sinha, S.K. Leong, Y.J. MECHANICAL ENGINEERING adhesion coefficient of friction grating MEMS microtribometer 10.1109/OMEMS.2011.6031010 International Conference on Optical MEMS and Nanophotonics 141-142 2014-04-24T10:17:05Z 2014-04-24T10:17:05Z 2011 Conference Paper Yu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2011.6031010" target="_blank">https://doi.org/10.1109/OMEMS.2011.6031010</a> 9781457703362 21605033 http://scholarbank.nus.edu.sg/handle/10635/51624 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic adhesion
coefficient of friction
grating
MEMS
microtribometer
spellingShingle adhesion
coefficient of friction
grating
MEMS
microtribometer
Yu, H.
Zhou, G.
Chau, F.S.
Sinha, S.K.
Leong, Y.J.
Microtribometer based on a rotational grating displacement sensing mechanism
description 10.1109/OMEMS.2011.6031010
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yu, H.
Zhou, G.
Chau, F.S.
Sinha, S.K.
Leong, Y.J.
format Conference or Workshop Item
author Yu, H.
Zhou, G.
Chau, F.S.
Sinha, S.K.
Leong, Y.J.
author_sort Yu, H.
title Microtribometer based on a rotational grating displacement sensing mechanism
title_short Microtribometer based on a rotational grating displacement sensing mechanism
title_full Microtribometer based on a rotational grating displacement sensing mechanism
title_fullStr Microtribometer based on a rotational grating displacement sensing mechanism
title_full_unstemmed Microtribometer based on a rotational grating displacement sensing mechanism
title_sort microtribometer based on a rotational grating displacement sensing mechanism
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/51624
_version_ 1681083880233238528

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