Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates

Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates

10.1016/j.nimb.2009.06.118

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Bibliographic Details
Main Authors: Gorelick, S., Zhang, F., van Kan, J.A., Whitlow, H.J., Watt, F.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Subjects:
Adhesion
Cr
High aspect ratio
Hydrogen silsesquioxane
Proton beam writing
Ti
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52771
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2009.06.118

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