Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates

Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates

10.1016/j.nimb.2009.06.118

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Bibliographic Details
Main Authors: Gorelick, S., Zhang, F., van Kan, J.A., Whitlow, H.J., Watt, F.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Subjects:
Adhesion
Cr
High aspect ratio
Hydrogen silsesquioxane
Proton beam writing
Ti
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52771
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Institution: National University of Singapore
id sg-nus-scholar.10635-52771
record_format dspace
spelling sg-nus-scholar.10635-527712023-10-30T08:52:36Z Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates Gorelick, S. Zhang, F. van Kan, J.A. Whitlow, H.J. Watt, F. NUS NANOSCIENCE & NANOTECH INITIATIVE PHYSICS Adhesion Cr High aspect ratio Hydrogen silsesquioxane Proton beam writing Ti 10.1016/j.nimb.2009.06.118 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 19 3314-3318 NIMBE 2014-05-19T02:49:50Z 2014-05-19T02:49:50Z 2009-10-01 Article Gorelick, S., Zhang, F., van Kan, J.A., Whitlow, H.J., Watt, F. (2009-10-01). Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (19) : 3314-3318. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.06.118 0168583X http://scholarbank.nus.edu.sg/handle/10635/52771 000272422800004 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Adhesion
Cr
High aspect ratio
Hydrogen silsesquioxane
Proton beam writing
Ti
spellingShingle Adhesion
Cr
High aspect ratio
Hydrogen silsesquioxane
Proton beam writing
Ti
Gorelick, S.
Zhang, F.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
description 10.1016/j.nimb.2009.06.118
author2 NUS NANOSCIENCE & NANOTECH INITIATIVE
author_facet NUS NANOSCIENCE & NANOTECH INITIATIVE
Gorelick, S.
Zhang, F.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
format Article
author Gorelick, S.
Zhang, F.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
author_sort Gorelick, S.
title Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
title_short Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
title_full Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
title_fullStr Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
title_full_unstemmed Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
title_sort adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (hsq) nanostructures on different metallic substrates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/52771
_version_ 1781411800762286080

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