Microdroplet and atomic force microscopy probe assisted formation of acidic thin layers for silicon nanostructuring

Microdroplet and atomic force microscopy probe assisted formation of acidic thin layers for silicon nanostructuring

10.1002/adfm.200600439

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Bibliographic Details
Main Authors: Xie, X.N., Chung, H.J., Sow, C.H., Wee, A.T.S.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53030
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Institution: National University of Singapore
Description
Summary:10.1002/adfm.200600439

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