Probe-induced native oxide decomposition and localized oxidation on 6H-SiC (0001) surface: An atomic force microscopy investigation

Probe-induced native oxide decomposition and localized oxidation on 6H-SiC (0001) surface: An atomic force microscopy investigation

10.1021/ja049560e

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Bibliographic Details
Main Authors: Xie, X.N., Chung, H.J., Xu, H., Xu, X., Sow, C.H., Wee, A.T.S.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/115244
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/115244

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