Probe-induced native oxide decomposition and localized oxidation on 6H-SiC (0001) surface: An atomic force microscopy investigation

• Main Authors: Xie, X.N., Chung, H.J., Xu, H., Xu, X., Sow, C.H., Wee, A.T.S.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/115244
• Institution: National University of Singapore

10.1021/ja049560e