Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

Thin Solid Films

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Bibliographic Details
Main Authors: Feng, Z.C., Tin, C.C., Hu, R., Williams, J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Chemical vapour deposition
Raman scattering
Rutherford backscattering spectroscopy
Silicon carbide
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53124
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Institution: National University of Singapore
Description
Summary:Thin Solid Films

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