Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

Thin Solid Films

Saved in:
Bibliographic Details
Main Authors: Feng, Z.C., Tin, C.C., Hu, R., Williams, J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Chemical vapour deposition
Raman scattering
Rutherford backscattering spectroscopy
Silicon carbide
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53124
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-53124
record_format dspace
spelling sg-nus-scholar.10635-531242015-01-06T22:10:40Z Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition Feng, Z.C. Tin, C.C. Hu, R. Williams, J. PHYSICS Chemical vapour deposition Raman scattering Rutherford backscattering spectroscopy Silicon carbide Thin Solid Films 266 1 1-7 THSFA 2014-05-19T02:54:32Z 2014-05-19T02:54:32Z 1995-09-15 Article Feng, Z.C.,Tin, C.C.,Hu, R.,Williams, J. (1995-09-15). Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition. Thin Solid Films 266 (1) : 1-7. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/53124 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Chemical vapour deposition
Raman scattering
Rutherford backscattering spectroscopy
Silicon carbide
spellingShingle Chemical vapour deposition
Raman scattering
Rutherford backscattering spectroscopy
Silicon carbide
Feng, Z.C.
Tin, C.C.
Hu, R.
Williams, J.
Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
description Thin Solid Films
author2 PHYSICS
author_facet PHYSICS
Feng, Z.C.
Tin, C.C.
Hu, R.
Williams, J.
format Article
author Feng, Z.C.
Tin, C.C.
Hu, R.
Williams, J.
author_sort Feng, Z.C.
title Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
title_short Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
title_full Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
title_fullStr Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
title_full_unstemmed Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition
title_sort raman and rutherford backscattering analyses of cubic sic thin films grown on si by vertical chemical vapor deposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/53124
_version_ 1681084103939588096

Similar Items