A dual BARC method for lithography and etch for Dual damascene with low K

A dual BARC method for lithography and etch for Dual damascene with low K

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Bibliographic Details
Main Authors: Mukherjee-Roy, M., Bliznetsov, V., Samudra, G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
BARC
Dual damascene
Etching
Faceting
Low K
Patterning
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54095
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-540952024-11-09T07:32:13Z A dual BARC method for lithography and etch for Dual damascene with low K Mukherjee-Roy, M. Bliznetsov, V. Samudra, G. ELECTRICAL & COMPUTER ENGINEERING BARC Dual damascene Etching Faceting Low K Patterning Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 5 A 2649-2653 JAPND 2014-06-16T09:26:58Z 2014-06-16T09:26:58Z 2003-05 Article Mukherjee-Roy, M.,Bliznetsov, V.,Samudra, G. (2003-05). A dual BARC method for lithography and etch for Dual damascene with low K. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 (5 A) : 2649-2653. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/54095 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic BARC
Dual damascene
Etching
Faceting
Low K
Patterning
spellingShingle BARC
Dual damascene
Etching
Faceting
Low K
Patterning
Mukherjee-Roy, M.
Bliznetsov, V.
Samudra, G.
A dual BARC method for lithography and etch for Dual damascene with low K
description Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Mukherjee-Roy, M.
Bliznetsov, V.
Samudra, G.
format Article
author Mukherjee-Roy, M.
Bliznetsov, V.
Samudra, G.
author_sort Mukherjee-Roy, M.
title A dual BARC method for lithography and etch for Dual damascene with low K
title_short A dual BARC method for lithography and etch for Dual damascene with low K
title_full A dual BARC method for lithography and etch for Dual damascene with low K
title_fullStr A dual BARC method for lithography and etch for Dual damascene with low K
title_full_unstemmed A dual BARC method for lithography and etch for Dual damascene with low K
title_sort dual barc method for lithography and etch for dual damascene with low k
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/54095
_version_ 1821188751706030080

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