A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography

10.1088/0957-0233/17/8/025

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Bibliographic Details
Main Authors:	Hu, N., Tay, A., Tsai, K.-Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Fault detection In situ estimation Photoresist processing Semiconductor manufacturing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54134
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54134
record_format	dspace
spelling	sg-nus-scholar.10635-541342023-10-27T09:05:56Z A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography Hu, N. Tay, A. Tsai, K.-Y. ELECTRICAL & COMPUTER ENGINEERING Fault detection In situ estimation Photoresist processing Semiconductor manufacturing 10.1088/0957-0233/17/8/025 Measurement Science and Technology 17 8 2233-2240 MSTCE 2014-06-16T09:27:44Z 2014-06-16T09:27:44Z 2006-08-01 Article Hu, N., Tay, A., Tsai, K.-Y. (2006-08-01). A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography. Measurement Science and Technology 17 (8) : 2233-2240. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/17/8/025 09570233 http://scholarbank.nus.edu.sg/handle/10635/54134 000239774300027 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Fault detection In situ estimation Photoresist processing Semiconductor manufacturing
spellingShingle	Fault detection In situ estimation Photoresist processing Semiconductor manufacturing Hu, N. Tay, A. Tsai, K.-Y. A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
description	10.1088/0957-0233/17/8/025
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Hu, N. Tay, A. Tsai, K.-Y.
format	Article
author	Hu, N. Tay, A. Tsai, K.-Y.
author_sort	Hu, N.
title	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
title_short	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
title_full	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
title_fullStr	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
title_full_unstemmed	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
title_sort	fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54134
_version_	1781411939988013056

A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography

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