A genetic optical interferometric inspection on micro-deformation

A genetic optical interferometric inspection on micro-deformation

Optik

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Bibliographic Details
Main Authors: Wang, S.H., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Fringe pattern
Interferometry
MEMS
Micro-components
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54215
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Institution: National University of Singapore
id sg-nus-scholar.10635-54215
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spelling sg-nus-scholar.10635-542152024-11-13T04:24:41Z A genetic optical interferometric inspection on micro-deformation Wang, S.H. Quan, C. Tay, C.J. MECHANICAL ENGINEERING Fringe pattern Interferometry MEMS Micro-components Optik 115 12 564-568 2014-06-16T09:28:47Z 2014-06-16T09:28:47Z 2004 Article Wang, S.H.,Quan, C.,Tay, C.J. (2004). A genetic optical interferometric inspection on micro-deformation. Optik 115 (12) : 564-568. ScholarBank@NUS Repository. 00304026 http://scholarbank.nus.edu.sg/handle/10635/54215 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Fringe pattern
Interferometry
MEMS
Micro-components
spellingShingle Fringe pattern
Interferometry
MEMS
Micro-components
Wang, S.H.
Quan, C.
Tay, C.J.
A genetic optical interferometric inspection on micro-deformation
description Optik
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Wang, S.H.
Quan, C.
Tay, C.J.
format Article
author Wang, S.H.
Quan, C.
Tay, C.J.
author_sort Wang, S.H.
title A genetic optical interferometric inspection on micro-deformation
title_short A genetic optical interferometric inspection on micro-deformation
title_full A genetic optical interferometric inspection on micro-deformation
title_fullStr A genetic optical interferometric inspection on micro-deformation
title_full_unstemmed A genetic optical interferometric inspection on micro-deformation
title_sort genetic optical interferometric inspection on micro-deformation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/54215
_version_ 1821233351869071360

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