A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging

A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging

10.1109/LPT.2011.2114877

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Bibliographic Details
Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Active alignment
lens holder
mechanical locking
microelectromechanical system (MEMS)
packaging
Si-photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54301
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Institution: National University of Singapore
Description
Summary:10.1109/LPT.2011.2114877

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