A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging

• Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Active alignment; lens holder; mechanical locking; microelectromechanical system (MEMS); packaging; Si-photonics
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/54301
• Institution: National University of Singapore

10.1109/LPT.2011.2114877