A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

10.1109/TRANSDUCERS.2011.5969466

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Bibliographic Details
Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Active alignment
Lens holder
Mechanical locking
MEMS
Packaging
Si-photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73069
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73069

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