A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

10.1109/TRANSDUCERS.2011.5969466

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Bibliographic Details
Main Authors:	Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Active alignment Lens holder Mechanical locking MEMS Packaging Si-photonics
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73069
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73069
record_format	dspace
spelling	sg-nus-scholar.10635-730692015-02-03T15:56:02Z A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L. MECHANICAL ENGINEERING Active alignment Lens holder Mechanical locking MEMS Packaging Si-photonics 10.1109/TRANSDUCERS.2011.5969466 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 1795-1798 2014-06-19T05:30:48Z 2014-06-19T05:30:48Z 2011 Conference Paper Zhang, Q.X.,Du, Y.,Tan, C.W.,Zhang, J.,Yu, M.B.,Lo, G.Q.,Kwong, D.L. (2011). A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 1795-1798. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/TRANSDUCERS.2011.5969466" target="_blank">https://doi.org/10.1109/TRANSDUCERS.2011.5969466</a> 9781457701573 http://scholarbank.nus.edu.sg/handle/10635/73069 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Active alignment Lens holder Mechanical locking MEMS Packaging Si-photonics
spellingShingle	Active alignment Lens holder Mechanical locking MEMS Packaging Si-photonics Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L. A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
description	10.1109/TRANSDUCERS.2011.5969466
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L.
format	Conference or Workshop Item
author	Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L.
author_sort	Zhang, Q.X.
title	A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
title_short	A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
title_full	A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
title_fullStr	A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
title_full_unstemmed	A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
title_sort	novel mems configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73069
_version_	1681087680460357632

A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

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