A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

• Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Active alignment; Lens holder; Mechanical locking; MEMS; Packaging; Si-photonics
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73069
• Institution: National University of Singapore

10.1109/TRANSDUCERS.2011.5969466