A new actuation scheme to enhance the linear momentum of MEMS inertia sensors

10.1016/j.sna.2004.10.018

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Bibliographic Details
Main Authors:	Zhao, T., Liang, Y.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Electronic interface Inertia sensor MEMS actuation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54482
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54482
record_format	dspace
spelling	sg-nus-scholar.10635-544822023-10-27T07:40:54Z A new actuation scheme to enhance the linear momentum of MEMS inertia sensors Zhao, T. Liang, Y.C. ELECTRICAL & COMPUTER ENGINEERING Electronic interface Inertia sensor MEMS actuation 10.1016/j.sna.2004.10.018 Sensors and Actuators, A: Physical 119 2 390-397 SAAPE 2014-06-16T09:31:36Z 2014-06-16T09:31:36Z 2005-04-13 Article Zhao, T., Liang, Y.C. (2005-04-13). A new actuation scheme to enhance the linear momentum of MEMS inertia sensors. Sensors and Actuators, A: Physical 119 (2) : 390-397. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.10.018 09244247 http://scholarbank.nus.edu.sg/handle/10635/54482 000228770400016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electronic interface Inertia sensor MEMS actuation
spellingShingle	Electronic interface Inertia sensor MEMS actuation Zhao, T. Liang, Y.C. A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
description	10.1016/j.sna.2004.10.018
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhao, T. Liang, Y.C.
format	Article
author	Zhao, T. Liang, Y.C.
author_sort	Zhao, T.
title	A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
title_short	A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
title_full	A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
title_fullStr	A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
title_full_unstemmed	A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
title_sort	new actuation scheme to enhance the linear momentum of mems inertia sensors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54482
_version_	1781411987656278016

A new actuation scheme to enhance the linear momentum of MEMS inertia sensors

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